[Equipmment] ;MDLN,equipment model ;SOFTREV, software version num MDLN=DemoMachine SOFTREV=1.0.2 EqpSerialNum=0001 EqpModel=UVMachine Manufacturer=Beckhoff Gmbh [Connection] ;ECS connection type, SECS connection mode, Device ID, IP Address, TCP Port No ;SECS connection type: SECS-I (Serial Port), HSMS (Ethernet, default) ;SECS connection mode: Active (Host is TCP server), Passive (Local PLC is TCP server, default) ;Device ID: 0 (default) ~ 32767 ;IP Address: In Active mode, host PC IP. In Passive, local PLC listening IP, 0.0.0.0 means listen at every local IP address ;TCP Port No: In Active mode, host PC listenning Port No. In Passive mode, local PLC listenning Port No. Default: 5000 CONN1=HSMS,Passive,0,0.0.0.0,5000 CONN2=HSMS,Passive,0,0.0.0.0,5001 CONN3=HSMS,Passive,0,0.0.0.0,5002 [Variables] ;Variable ID, GEM Variable Name, PLC Variable Name, Variable Type, Persistent(False/True), Variable Value Type, Unit, MinValue, MaxValue, DefaultValue, Description ;Variable Type: SV(Status Variable), DV(Data Variable), EC(Equipment Constant) ;Variable Value Type: L/B/BOOLEAN/A/I1/I2/I4/I8/U1/U2/U4/U8/F4/F8 CHA.Temperature=1001,SV,MAIN.CHA.Temperature,False,F8,C,0,100,25,Chamber heater temperature reading CHA.Pressure=1002,SV,MAIN.CHA.Pressure,False,F8,mBar,0,1020,750,Chamber vac pressure reading CHA.StepNo=1003,SV,MAIN.CHA.RecipeStep,False,I2,,0,1000,0,Chamber current recipe step number CHA.RecipeName=1004,SV,MAIN.CHA.RecipeName,False,A,,,,,Chamber recipe name CHA.OverTempThreshold=1005,EC,MAIN.CHA.OverTempThreshold,True,F8,C,0,1000,100,Over temperature alarm threshold CHA.OverPressThreshold=1006,EC,MAIN.CHA.OverPressThreshold,True,F8,mBar,0,2000,760,Over pressure alarm threshold CHB.Temperature=2001,SV,MAIN.CHB.Temperature,False,F8,C,0,100,25,Chamber heater temperature reading CHB.Pressure=2002,SV,MAIN.CHB.Pressure,False,F8,mBar,0,1020,750,Chamber vac pressure reading CHB.StepNo=2003,SV,MAIN.CHB.RecipeStep,False,I2,,0,1000,0,Chamber current recipe step number CHB.RecipeName=2004,SV,MAIN.CHB.RecipeName,False,A,,,,,Chamber recipe name CHB.OverTempThreshold=2005,EC,MAIN.CHB.OverTempThreshold,True,F8,C,0,1000,100,Over temperature alarm threshold CHB.OverPressThreshold=2006,EC,MAIN.CHB.OverPressThreshold,True,F8,mBar,0,2000,760,Over pressure alarm threshold StepNo=3001,DV,,False,I2,,0,1000,0,Chamber current recipe step numberStepNo=3001,DV,,False,I2,,0,100000,0,Chamber current recipe step number RecipeName=3002,DV,,False,A,,,,,Chamber recipe name ChamberName=3003,DV,,False,A,,,,,Chamber name Temperature=3004,DV,,False,F8,C,0,1000,100,Over temperature alarm threshold Pressure=3005,DV,,False,F8,mBar,0,2000,760,Over pressure alarm threshold [Events] ;Event ID, Event Name, Description, Associated Variable Names RecipeStarted=1001,Triggered when recipe starts,RecipeName|ChamberName RecipeCompleted=1002,Triggered when recipe succ completes,RecipeName|ChamberName RecipeStopped=1003,Triggered when recipe is stopped,RecipeName|ChamberName RecipeStepStarted=1010,Triggered when recipe step starts,RecipeName|ChamberName|StepNo RecipeStepComplete=1011,Triggered when recipe step succ completes,RecipeName|ChamberName|StepNo RecipeStepStopped=1012,Triggered when recipe step is stopped,RecipeName|ChamberName|StepNo ;Following SEMI standard, each alarm should associate with two events CHA.OverTempAlarm_SET=2001,CHA.OverTempAlarm SET event,ChamberName|Temperature CHA.OverTempAlarm_CLEAR=2002,CHA.OverTempAlarm CLEAR event,ChamberName|Temperature CHA.OverPressAlarm_SET=2003,CHA.OverPress SET event,ChamberName|Pressure CHA.OverPressAlarm_CLEAR=2004,CHA.OverPress CLEAR event,ChamberName|Pressure CHB.OverTempAlarm_SET=3001,CHB.OverTempAlarm SET event,ChamberName|Temperature CHB.OverTempAlarm_CLEAR=3002,CHB.OverTempAlarm CLEAR event,ChamberName|Temperature CHB.OverPressAlarm_SET=3003,CHB.OverPress SET event,ChamberName|Pressure CHB.OverPressAlarm_CLEAR=3004,CHB.OverPress CLEAR event,ChamberName|Pressure [Alarms] ;Alarm ID, Alarm Name, Alarm Text, Alarm Code, SetEventName, ClearEventName, Description ;Alarm Code: 0 = Not used, 1 = Personal safety, 2 = Equipment safety, 3 = Parameter control warning, 4 = Parameter control error, 5 = Irrecoverable error, 6 = Equipment status warning, 7 = Attention flags, 8 = Data integrity, >8 = Other categories CHA.OverTempAlarm=101,CHA over temperature alarm,2,CHA.OverTempAlarm_SET,CHA.OverTempAlarm_CLEAR,Chamber A over temperaure alarm CHA.OverPressAlarm=102,CHA over pressure alarm,2,CHA.OverPressAlarm_SET,CHA.OverPressAlarm_CLEAR,Chamber A over pressure alarm CHB.OverTempAlarm=201,CHB over temperature alarm,2,CHB.OverTempAlarm_SET,CHB.OverTempAlarm_CLEAR,Chamber B over temperaure alarm CHB.OverPressAlarm=202,CHB over pressure alarm,2,CHB.OverPressAlarm_SET,CHB.OverPressAlarm_CLEAR,Chamber B over pressure alarm [RemoteCommands] ;Remote command name,Tigger symbol name,P1 symbol name,P2 symbol name,P3 symbol name,P4 symbol name,P5 symbol name,P6 symbol name,P7 symbol name,P8 symbol name,P9 symbol name,P10 symbol name RCMD1=PP-SELECT,HandleRemoteCommand.RemoteCommandArrival,HandleRemoteCommand.RemoteCommandName,HandleRemoteCommand.P1,HandleRemoteCommand.P2,,,,,,,, RCMD2=START,HandleRemoteCommand.RemoteCommandArrival,HandleRemoteCommand.RemoteCommandName,HandleRemoteCommand.P1,HandleRemoteCommand.P2,,,,,,,, RCMD3=STOP,HandleRemoteCommand.RemoteCommandArrival,HandleRemoteCommand.RemoteCommandName,HandleRemoteCommand.P1,HandleRemoteCommand.P2,,,,,,,, [TerminalRequest] ;Terminal ID,PLC varaible to indicate a new message arrival,PLC variable of received terminal message content TID=0,Host.IsTerminalMessageReceived,Host.ReceivedTermialMessage