【产品-KXPandora】

[Equipmment]

;MDLN,equipment model

;SOFTREV, software version num

MDLN=DemoMachine

SOFTREV=1.0.2

EqpSerialNum=0001

EqpModel=UVMachine

Manufacturer=Beckhoff Gmbh

[Connection]

;ECS connection type, SECS connection mode, Device ID, IP Address, TCP Port No

;SECS connection type: SECS-I (Serial Port), HSMS (Ethernet, default)

;SECS connection mode: Active (Host is TCP server), Passive (Local PLC is TCP server, default)

;Device ID: 0 (default) ~ 32767

;IP Address: In Active mode, host PC IP. In Passive, local PLC listening IP, 0.0.0.0 means listen at every local IP address

;TCP Port No: In Active mode, host PC listenning Port No. In Passive mode, local PLC listenning Port No. Default: 5000

CONN1=HSMS,Passive,0,0.0.0.0,5000

CONN2=HSMS,Passive,0,0.0.0.0,5001

CONN3=HSMS,Passive,0,0.0.0.0,5002

[Variables]

;Variable ID, GEM Variable Name, PLC Variable Name, Variable Type, Persistent(False/True), Variable Value Type, Unit, MinValue, MaxValue, DefaultValue, Description

;Variable Type: SV(Status Variable), DV(Data Variable), EC(Equipment Constant)

;Variable Value Type: L/B/BOOLEAN/A/I1/I2/I4/I8/U1/U2/U4/U8/F4/F8

CHA.Temperature=1001,SV,MAIN.CHA.Temperature,False,F8,C,0,100,25,Chamber heater temperature reading

CHA.Pressure=1002,SV,MAIN.CHA.Pressure,False,F8,mBar,0,1020,750,Chamber vac pressure reading

CHA.StepNo=1003,SV,MAIN.CHA.RecipeStep,False,I2,,0,1000,0,Chamber current recipe step number

CHA.RecipeName=1004,SV,MAIN.CHA.RecipeName,False,A,,,,,Chamber recipe name

CHA.OverTempThreshold=1005,EC,MAIN.CHA.OverTempThreshold,True,F8,C,0,1000,100,Over temperature alarm threshold

CHA.OverPressThreshold=1006,EC,MAIN.CHA.OverPressThreshold,True,F8,mBar,0,2000,760,Over pressure alarm threshold

CHB.Temperature=2001,SV,MAIN.CHB.Temperature,False,F8,C,0,100,25,Chamber heater temperature reading

CHB.Pressure=2002,SV,MAIN.CHB.Pressure,False,F8,mBar,0,1020,750,Chamber vac pressure reading

CHB.StepNo=2003,SV,MAIN.CHB.RecipeStep,False,I2,,0,1000,0,Chamber current recipe step number

CHB.RecipeName=2004,SV,MAIN.CHB.RecipeName,False,A,,,,,Chamber recipe name

CHB.OverTempThreshold=2005,EC,MAIN.CHB.OverTempThreshold,True,F8,C,0,1000,100,Over temperature alarm threshold

CHB.OverPressThreshold=2006,EC,MAIN.CHB.OverPressThreshold,True,F8,mBar,0,2000,760,Over pressure alarm threshold

StepNo=3001,DV,,False,I2,,0,1000,0,Chamber current recipe step numberStepNo=3001,DV,,False,I2,,0,100000,0,Chamber current recipe step number

RecipeName=3002,DV,,False,A,,,,,Chamber recipe name

ChamberName=3003,DV,,False,A,,,,,Chamber name

Temperature=3004,DV,,False,F8,C,0,1000,100,Over temperature alarm threshold

Pressure=3005,DV,,False,F8,mBar,0,2000,760,Over pressure alarm threshold

[Events]

;Event ID, Event Name, Description, Associated Variable Names

RecipeStarted=1001,Triggered when recipe starts,RecipeName|ChamberName

RecipeCompleted=1002,Triggered when recipe succ completes,RecipeName|ChamberName

RecipeStopped=1003,Triggered when recipe is stopped,RecipeName|ChamberName

RecipeStepStarted=1010,Triggered when recipe step starts,RecipeName|ChamberName|StepNo

RecipeStepComplete=1011,Triggered when recipe step succ completes,RecipeName|ChamberName|StepNo

RecipeStepStopped=1012,Triggered when recipe step is stopped,RecipeName|ChamberName|StepNo

;Following SEMI standard, each alarm should associate with two events

CHA.OverTempAlarm_SET=2001,CHA.OverTempAlarm SET event,ChamberName|Temperature

CHA.OverTempAlarm_CLEAR=2002,CHA.OverTempAlarm CLEAR event,ChamberName|Temperature

CHA.OverPressAlarm_SET=2003,CHA.OverPress SET event,ChamberName|Pressure

CHA.OverPressAlarm_CLEAR=2004,CHA.OverPress CLEAR event,ChamberName|Pressure

CHB.OverTempAlarm_SET=3001,CHB.OverTempAlarm SET event,ChamberName|Temperature

CHB.OverTempAlarm_CLEAR=3002,CHB.OverTempAlarm CLEAR event,ChamberName|Temperature

CHB.OverPressAlarm_SET=3003,CHB.OverPress SET event,ChamberName|Pressure

CHB.OverPressAlarm_CLEAR=3004,CHB.OverPress CLEAR event,ChamberName|Pressure

[Alarms]

;Alarm ID, Alarm Name, Alarm Text, Alarm Code, SetEventName, ClearEventName, Description

;Alarm Code: 0 = Not used, 1 = Personal safety, 2 = Equipment safety, 3 = Parameter control warning, 	4 = Parameter control error, 5 = Irrecoverable error, 6 = Equipment status warning, 7 = Attention flags, 8 = Data integrity, >8 = Other categories

CHA.OverTempAlarm=101,CHA over temperature alarm,2,CHA.OverTempAlarm_SET,CHA.OverTempAlarm_CLEAR,Chamber A over temperaure alarm

CHA.OverPressAlarm=102,CHA over pressure alarm,2,CHA.OverPressAlarm_SET,CHA.OverPressAlarm_CLEAR,Chamber A over pressure alarm

CHB.OverTempAlarm=201,CHB over temperature alarm,2,CHB.OverTempAlarm_SET,CHB.OverTempAlarm_CLEAR,Chamber B over temperaure alarm

CHB.OverPressAlarm=202,CHB over pressure alarm,2,CHB.OverPressAlarm_SET,CHB.OverPressAlarm_CLEAR,Chamber B over pressure alarm

[RemoteCommands]

;Remote command name,Tigger symbol name,P1 symbol name,P2 symbol name,P3 symbol name,P4 symbol name,P5 symbol name,P6 symbol name,P7 symbol name,P8 symbol name,P9 symbol name,P10 symbol name

RCMD1=PP-SELECT,HandleRemoteCommand.RemoteCommandArrival,HandleRemoteCommand.RemoteCommandName,HandleRemoteCommand.P1,HandleRemoteCommand.P2,,,,,,,,

RCMD2=START,HandleRemoteCommand.RemoteCommandArrival,HandleRemoteCommand.RemoteCommandName,HandleRemoteCommand.P1,HandleRemoteCommand.P2,,,,,,,,

RCMD3=STOP,HandleRemoteCommand.RemoteCommandArrival,HandleRemoteCommand.RemoteCommandName,HandleRemoteCommand.P1,HandleRemoteCommand.P2,,,,,,,,

[TerminalRequest]

;Terminal ID,PLC varaible to indicate a new message arrival,PLC variable of received terminal message content

TID=0,Host.IsTerminalMessageReceived,Host.ReceivedTermialMessage